Interactive Tool
Legacy Node Yield Estimator
Estimate the cost premium of relying on multi-patterning for advanced nodes vs legacy expansion.
Estimated Monthly Opex (Million USD)
Methodology & Assumptions
Without access to EUV lithography, manufacturing nodes below 14nm requires extensive DUV multi-patterning. This drastically increases defect rates and operational costs per wafer. The model applies a cost multiplier for each required patterning pass.